The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 22, 2015
Filed:
Dec. 21, 2007
Applicants:
Suvi P. Haukka, Helsinki, FI;
Kai-erik Elers, Vantaa, FI;
Inventors:
Suvi P. Haukka, Helsinki, FI;
Kai-Erik Elers, Vantaa, FI;
Assignee:
ASM INTERNATIONAL N.V., Bilthoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23C 16/455 (2006.01); C23C 16/06 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45555 (2013.01); C23C 16/06 (2013.01); C23C 16/45525 (2013.01);
Abstract
Methods of forming thin films on nanopatterning templates, such as nanoimprint lithography (NIL) templates are provided. In some embodiments, an atomic layer deposition (ALD) type process for modifying the surface of a NIL template comprises alternately and sequentially contacting a substrate in a reaction space with vapor phase pulses of two or more reactants.