The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 15, 2015

Filed:

Aug. 31, 2014
Applicant:

United Microelectronics Corp., Hsin-Chu, TW;

Inventors:

Chung-Chih Chang, Taichung, TW;

Kuo-Hsun Huang, Miaoli County, TW;

Chao-Yao Chiang, Hsinchu, TW;

Assignee:

UNITED MICROELECTRONICS CORP., Science-Based Industrial Park, Hsin-Chu, TW;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 17/50 (2006.01);
U.S. Cl.
CPC ...
G06F 17/5081 (2013.01);
Abstract

The optical proximity correction verification method includes loading a layout data to be verified to a processor, loading a reference layout data to the processor. The processor performs a first stage Boolean operation on the layout data to be verified to generate first verified data. The processor performs a layout versus layout verification on the first verified data to generate second verified data by using the reference layout data. If the layout versus layout verification is successfully performed, the processor performs a second stage Boolean operation on the second verified data to generate third verified data. By using the reference layout data, the processor performs a Boolean check on the third verified data to generate fourth verified data.


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