The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Dec. 02, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Albertus Aemillius Seyno Sluijterman, Eindhoven, NL;
Eric Gerardus Theodoor Bosch, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/26 (2006.01); H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 37/26 (2013.01); H01J 37/265 (2013.01); H01J 2237/153 (2013.01); H01J 2237/221 (2013.01); H01J 2237/2441 (2013.01);
Abstract
A method of investigating a flux of output electrons emanating from a sample in a charged-particle microscope, which flux is produced in response to irradiation of the sample by a beam of input charged particles, the method comprising the following steps: