The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Feb. 23, 2011
Vladimir Dmitriev, Karmiel, IL;
Ofir Sharoni, Karkur (Pardess Hanna-Karkur), IL;
Erez Graitzer, Gilon, IL;
Igor Varvaruk, Migdal Haemek, IL;
Guy Ben-zvi, Shechania, IL;
Vladimir Dmitriev, Karmiel, IL;
Ofir Sharoni, Karkur (Pardess Hanna-Karkur), IL;
Erez Graitzer, Gilon, IL;
Igor Varvaruk, Migdal Haemek, IL;
Guy Ben-Zvi, Shechania, IL;
Carl Zeiss SMS Ltd., Karmiel, IL;
Abstract
A method includes generating, using a data processor, information showing variations of a parameter across a photo mask relative to an average value of the parameter measured at various locations on the photo mask. For example, the information can include data points, and each data point can be determined based on a ratio between a measurement value and an average of a plurality of measurement values.