The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Feb. 20, 2014
Nuflare Technology, Inc., Yokohama, JP;
Riki Ogawa, Kanagawa, JP;
Hiromu Inoue, Kanagawa, JP;
NuFlare Technology, Inc., Yokohama, JP;
Abstract
A sample support apparatus is provided in which a XY-table and a Z-table moving along a height direction are disposed in a Z-reference surface as a height reference, and in which a sample is disposed at a predetermined height position while supported by the Z-table, the sample support apparatus comprising, a height correction unit that controls movement of the Z-table, and a Z-sensor that is provided on the Z-reference surface to measure the height from the Z-reference surface, wherein a measuring surface is aligned along the same axis with respect to a measuring position of the sample, the height of the measuring surface from the Z-reference surface is measured by the Z-sensor, the height correction unit moves the Z-table according to the measured value of the height so that the sample is disposed at the predetermined height position.