The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 08, 2015
Filed:
Sep. 18, 2008
Boris Druz, Brooklyn, NY (US);
Roger P. Fremgen, Jr., East Northport, NY (US);
Alan V. Hayes, Great Neck, NY (US);
Viktor Kanarov, Bellmore, NY (US);
Robert Krause, Levittown, NY (US);
Ira Reiss, New City, NY (US);
Piero Sferlazzo, Marblehead, MA (US);
Boris Druz, Brooklyn, NY (US);
Roger P. Fremgen, Jr., East Northport, NY (US);
Alan V. Hayes, Great Neck, NY (US);
Viktor Kanarov, Bellmore, NY (US);
Robert Krause, Levittown, NY (US);
Ira Reiss, New City, NY (US);
Piero Sferlazzo, Marblehead, MA (US);
Other;
Abstract
Method and apparatus for processing a substrate with an energetic particle beam. Features on the substrate are oriented relative to the energetic particle beam and the substrate is scanned through the energetic particle beam. The substrate is periodically indexed about its azimuthal axis of symmetry, while shielded from exposure to the energetic particle beam, to reorient the features relative to the major dimension of the beam.