The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 01, 2015

Filed:

May. 01, 2014
Applicant:

International Rectifier Corporation, El Segundo, CA (US);

Inventors:

Timothy D. Henson, Torrance, CA (US);

Kapil Kelkar, Torrance, CA (US);

Ljubo Radic, Torrance, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 31/113 (2006.01); H01L 21/336 (2006.01); H01L 21/3205 (2006.01); H01L 29/40 (2006.01); H01L 29/78 (2006.01); H01L 29/66 (2006.01); H01L 21/765 (2006.01); H01L 21/308 (2006.01);
U.S. Cl.
CPC ...
H01L 29/407 (2013.01); H01L 21/3083 (2013.01); H01L 21/765 (2013.01); H01L 29/66674 (2013.01); H01L 29/7801 (2013.01);
Abstract

Disclosed is a power device, such as a power MOSFET device and a method for fabricating same. The device includes a field plate trench. The field plate trench has a predetermined width and a predetermined sidewall angle. The device further includes a single trench dielectric on sidewalls of the field plate trench and at a bottom of the field plate trench. The single trench dielectric has a bottom thickness that is greater than a sidewall thickness. The device also includes a field plate situated within the single trench dielectric.


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