The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 01, 2015
Filed:
Mar. 08, 2012
Applicant:
Ken Maruyama, Tokyo, JP;
Inventor:
Ken Maruyama, Tokyo, JP;
Assignee:
JSR CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C08F 20/10 (2006.01); C07C 307/06 (2006.01); C07C 309/07 (2006.01); C07C 309/17 (2006.01); C08F 20/28 (2006.01); C08F 20/54 (2006.01); G03F 7/039 (2006.01);
U.S. Cl.
CPC ...
C08F 20/10 (2013.01); C07C 307/06 (2013.01); C07C 309/07 (2013.01); C07C 309/12 (2013.01); C07C 309/17 (2013.01); C07C 381/12 (2013.01); C08F 20/28 (2013.01); C08F 20/54 (2013.01); G03F 7/0045 (2013.01); G03F 7/0392 (2013.01); G03F 7/0397 (2013.01); C07C 2101/08 (2013.01); C07C 2101/14 (2013.01); C07C 2102/42 (2013.01); C07C 2103/74 (2013.01);
Abstract
A radiation-sensitive composition includes a photoacid generator shown by a general formula (0-1a). Each of Rindividually represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and Mrepresents a monovalent onium cation. A compound is shown by a general formula (0). R represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and Mrepresents a monovalent onium cation.