The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 24, 2015

Filed:

Feb. 11, 2014
Applicant:

Globalfoundries, Inc., Grand Cayman, KY;

Inventors:

Andy Wei, Queensbury, NY (US);

Jin Ping Liu, Hopewell Junction, NY (US);

Shao Ming Koh, Clifton Park, NY (US);

Amaury Gendron, San Jose, CA (US);

Assignee:

GLOBALFOUNDRIES, INC., Grand Cayman, KY;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/336 (2006.01); H01L 29/66 (2006.01); H01L 21/8238 (2006.01); H01L 29/78 (2006.01); H01L 29/165 (2006.01);
U.S. Cl.
CPC ...
H01L 29/6681 (2013.01); H01L 21/823821 (2013.01); H01L 29/165 (2013.01); H01L 29/785 (2013.01);
Abstract

Integrated circuits with relaxed silicon and germanium fins and methods for fabricating such integrated circuits are provided. The method includes a forming a crystalline silicon and germanium composite layer overlying a crystalline silicon substrate, where a composite layer crystal lattice is relaxed. A fin is formed in the composite layer, and a gate is formed overlying the fin. A portion of the fin is removed on opposite sides of the gate to form a drain cavity and a source cavity, and a source and a drain are formed in the source cavity and drain cavity, respectively.


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