The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Dec. 03, 2012
Joeri Lof, Eindhoven, NL;
Joannes Theodoor DE Smit, Eindhoven, NL;
Roelof Aeilko Siebrand Ritsema, Eindhoven, NL;
Klaus Simon, Eindhoven, NL;
Theodorus Marinus Modderman, Nuenen, NL;
Johannes Catharinus Hubertus Mulkens, Maastricht, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
Joeri Lof, Eindhoven, NL;
Joannes Theodoor De Smit, Eindhoven, NL;
Roelof Aeilko Siebrand Ritsema, Eindhoven, NL;
Klaus Simon, Eindhoven, NL;
Theodorus Marinus Modderman, Nuenen, NL;
Johannes Catharinus Hubertus Mulkens, Maastricht, NL;
Hendricus Johannes Maria Meijer, Veldhoven, NL;
Erik Roelof Loopstra, Heeze, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A map of the surface of a substrate is generated at a measurement station. The substrate is then moved to where a space between a projection lens and the substrate is filled with a liquid. The substrate is then aligned using, for example, a transmission image sensor and, using the previous mapping, the substrate can be accurately exposed. Thus the mapping does not take place in a liquid environment.