The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Sep. 02, 2011
Stojan Kanev, Thiendorf OT Sacka, DE;
Botho Hirschfeld, Dresden, DE;
Axel Becker, Dresden, DE;
Ulf Hackius, Dresden, DE;
Stojan Kanev, Thiendorf OT Sacka, DE;
Botho Hirschfeld, Dresden, DE;
Axel Becker, Dresden, DE;
Ulf Hackius, Dresden, DE;
Cascade Microtech, Inc., Beaverton, OR (US);
Abstract
The invention relates to a prober for checking and testing electronic semiconductor components and methods of using the same. The prober comprises at least two checking units, each of which is equipped with a chuck, probes, and a positioning unit, and each of which is assigned to a machine control system and a process control system. The prober further comprises a loading unit for automatically loading both testing units and an additional loader for manually loading at least one of the testing units, a user interface, and a module control system for controlling the process control systems and/or the machine control systems and the loading unit. The user interface can optionally be connected to at least one of the process control systems or the module control system by means of a switching device of the prober.