The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Feb. 15, 2010
Hiroyuki Tachibana, Tamano, JP;
Kazutoshi Murata, Tamano, JP;
Naomasa Miyatake, Tamano, JP;
Yasunari Mori, Tamano, JP;
Hiroyuki Tachibana, Tamano, JP;
Kazutoshi Murata, Tamano, JP;
Naomasa Miyatake, Tamano, JP;
Yasunari Mori, Tamano, JP;
MITSUI ENGINEERING & SHIPBUILDING, Tokyo, JP;
Abstract
An atomic layer deposition apparatus for forming a thin film on a substrate, including a first container that defines a first inner space, a second container provided inside the first container to define a second inner space, the second container being canister-shaped and including a first opening at one end thereof, a source gas that forms the thin film on the substrate flowing to the second inner space through the first opening, and a pressing member including a gas supply port for supplying the source gas to the second inner space through the first opening, the pressing member being configured to press the second container in a longitudinal direction of the second container so that the second inner space be separated from the first inner space.