The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 24, 2015
Filed:
Nov. 01, 2012
Applicant:
Ube Industries, Ltd., Ube-shi, Yamaguchi, JP;
Inventors:
Assignee:
UBE Industries, Ltd., Yamaguchi, JP;
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C07F 5/06 (2006.01); C23C 16/20 (2006.01); C23C 16/40 (2006.01); C23C 16/448 (2006.01);
U.S. Cl.
CPC ...
C23C 16/20 (2013.01); C07F 5/069 (2013.02); C23C 16/403 (2013.01); C23C 16/4482 (2013.01);
Abstract
The present invention relates to a tris(dialkylamide)aluminum compound, and a method for producing an aluminum-containing thin film using the aluminum compound, the tris(dialkylamide)aluminum compound being represented by the formula (1): wherein