The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
Jul. 27, 2012
Antonius Theodorus Wilhelmus Kempen, Rosmalen, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Corne Rentrop, Eindhoven, NL;
Dennis DE Graaf, Waalre, NL;
Frits Gubbels, Helmond, NL;
Gregory Richard Hayes, Eindhoven, NL;
Hubertus Johannes Van DE Wiel, 's-Hertogenbosch, NL;
Antonius Theodorus Wilhelmus Kempen, Rosmalen, NL;
Erik Roelof Loopstra, Eindhoven, NL;
Corne Rentrop, Eindhoven, NL;
Dennis De Graaf, Waalre, NL;
Frits Gubbels, Helmond, NL;
Gregory Richard Hayes, Eindhoven, NL;
Hubertus Johannes Van De Wiel, 's-Hertogenbosch, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma. The nozzle has an internal surface that is configured to prevent contamination present in fuel used to form the fuel droplets from being deposited on that internal surface.