The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 17, 2015
Filed:
May. 18, 2011
Applicants:
Shinya Yamada, Kawasaki, JP;
Yuji Takagi, Kamakura, JP;
Inventors:
Shinya Yamada, Kawasaki, JP;
Yuji Takagi, Kamakura, JP;
Assignee:
Hitachi High-Technologies Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06K 9/00 (2006.01); H04N 7/18 (2006.01); H01J 37/244 (2006.01); H01J 37/28 (2006.01); G01N 23/00 (2006.01);
U.S. Cl.
CPC ...
H04N 7/18 (2013.01); H01J 37/244 (2013.01); H01J 37/28 (2013.01); G01B 2210/56 (2013.01); H01J 2237/221 (2013.01); H01J 2237/24578 (2013.01);
Abstract
A technique for calculating the angle from an auxiliary dot sequence indicating the track of a pattern and for performing pattern measurement is provided, thereby enabling achievement of high-accuracy pattern measurement with reduced influence of the roughness of pattern edges.