The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 17, 2015

Filed:

Jul. 19, 2013
Applicant:

Advantest Corporation, Tokyo, JP;

Inventors:

Tomoyu Yamashita, Miyagi, JP;

Akiyoshi Irisawa, Miyagi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/13 (2006.01); H01S 3/137 (2006.01); H01S 3/10 (2006.01); H01S 3/139 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
H01S 3/13 (2013.01); H01S 3/10046 (2013.01); H01S 3/10053 (2013.01); H01S 3/137 (2013.01); H01S 3/139 (2013.01); H01S 3/23 (2013.01); H01S 3/2383 (2013.01); H01S 3/1307 (2013.01); H01S 3/1394 (2013.01);
Abstract

A pulse light source includes: a master laser that outputs a master laser light pulse whose repetition frequency is controlled to a predetermined value; a slave laser that outputs a slave laser light pulse; a phase comparator that detects a phase difference between an electric signal having a frequency of the predetermined value, and an electric signal based on a light intensity of the slave laser light pulse; a loop filter; an adder that adds a repetition frequency control signal having a certain repetition cycle, to an output from the loop filter; and a phase comparator that measures a pulse phase difference which is a phase difference between the master laser light pulse and the slave laser light pulse. A magnitude of the repetition frequency control signal is controlled such that the measured pulse phase difference matches with a target value of the pulse phase difference.


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