The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 03, 2015
Filed:
May. 20, 2009
Roger Wilhelmus Antonius Henricus Schmitz, Helmond, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Marcel Johannus Elisabeth Hubertus Muitjens, Nuth, NL;
Lun Cheng, Krimpen aan den Ijssel, NL;
Franciscus Johannes Joseph Janssen, Geldrop, NL;
Willem Arie Van Helden, Bergschenhoek, NL;
Richard Versluis, Delft, NL;
Paulus Bartholomeus Johannes Schaareman, Eindhoven, NL;
Axel Sebastiaan Lexmond, Voorschoten, NL;
Evert Nieuwkoop, Pijnacker, NL;
Charles William Barras Potts, Wallington, GB;
Martinus Henricus Johannes Lemmen, Haarlem, NL;
Frederik Van Der Graaf, Zuidland, NL;
Mathilde Gertrudis Maria DE Kroon, Delfgauw, NL;
Johannes Fransiscus Maria Velthuis, Leiden, NL;
Roger Wilhelmus Antonius Henricus Schmitz, Helmond, NL;
Tjarko Adriaan Rudolf Van Empel, Eindhoven, NL;
Marcel Johannus Elisabeth Hubertus Muitjens, Nuth, NL;
Lun Cheng, Krimpen aan den Ijssel, NL;
Franciscus Johannes Joseph Janssen, Geldrop, NL;
Willem Arie Van Helden, Bergschenhoek, NL;
Richard Versluis, Delft, NL;
Paulus Bartholomeus Johannes Schaareman, Eindhoven, NL;
Axel Sebastiaan Lexmond, Voorschoten, NL;
Evert Nieuwkoop, Pijnacker, NL;
Charles William Barras Potts, Wallington, GB;
Martinus Henricus Johannes Lemmen, Haarlem, NL;
Frederik Van Der Graaf, Zuidland, NL;
Mathilde Gertrudis Maria De Kroon, Delfgauw, NL;
Johannes Fransiscus Maria Velthuis, Leiden, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A method for thermally conditioning an optical element includes irradiating the optical element with radiation, not-irradiating the optical element with the radiation, allowing heat flow between the optical element and a conditioning fluid that is held in a conditioning fluid reservoir, and providing a fluid flow of the conditioning fluid, to supply thermally conditioned fluid to the reservoir. A flow rate of the fluid during the irradiating of the optical element is lower than a flow rate of the fluid when the optical element is not-irradiated.