The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Jun. 01, 2011
Applicants:

Guoguang LI, Beijing, CN;

Tao Liu, Beijing, CN;

Edgar Genio, Beijing, CN;

Tiezhong MA, Beijing, CN;

Xiaolang Yan, Beijing, CN;

Inventors:

Guoguang Li, Beijing, CN;

Tao Liu, Beijing, CN;

Edgar Genio, Beijing, CN;

Tiezhong Ma, Beijing, CN;

Xiaolang Yan, Beijing, CN;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 (2006.01); G01N 21/21 (2006.01); G01J 3/02 (2006.01);
U.S. Cl.
CPC ...
G01N 21/211 (2013.01); G01J 3/02 (2013.01); G01J 3/021 (2013.01); G01J 3/0208 (2013.01); G01J 3/0224 (2013.01); G01N 21/21 (2013.01);
Abstract

A kind of normal incidence broadband spectroscopic polarimeter which is easy to adjust the focus, has no chromatic aberration, maintains the polarization and has simple structure. The normal incidence broadband spectroscopic polarimeter can make the probe beam normal incidence and focus on the sample surface by using at least one flat reflector element to change propagation direction of the focused beam. Moreover, the normal incidence broadband spectroscopic polarimeter contains at least one polarizer as to measure the anisotropy or non-uniform samples, such as three-dimensional profile and material optical constants of thin films consisting of the periodic structure. An optical measurement system including the normal incidence broadband spectroscopic polarimeter is also provided.


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