The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 03, 2015

Filed:

Apr. 25, 2013
Applicant:

Advantest Corporation, Tokyo, JP;

Inventors:

Shigeki Nishina, Miyagi, JP;

Motoki Imamura, Miyagi, JP;

Akiyoshi Irisawa, Miyagi, JP;

Tomoyu Yamashita, Miyagi, JP;

Eiji Kato, Miyagi, JP;

Kodo Kawase, Aichi, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01S 3/02 (2006.01); G01J 5/02 (2006.01); G01N 21/3581 (2014.01); G01N 21/88 (2006.01); G01N 21/3563 (2014.01);
U.S. Cl.
CPC ...
G01J 5/0285 (2013.01); G01N 21/3581 (2013.01); G01N 21/8806 (2013.01); G01N 21/3563 (2013.01);
Abstract

An electromagnetic wave measurement device includes an electromagnetic wave outputter that outputs an electromagnetic wave having a frequency equal to or more than 0.01 THz and equal to or less than 100 THz toward a device under test. An electromagnetic wave detector detects the electromagnetic wave which has transmitted through the device under test. A relative position changer changes a relative position of an intersection of an optical path of the electromagnetic wave transmitting through the device under test and the device under test, with respect to the device under test, so that the intersection is at a predetermined relative position due to the refraction of the electromagnetic wave by the device under test. A characteristic value deriver derives a characteristic value of the electromagnetic wave based on a detection result of the electromagnetic wave detector, the characteristic value being associated with the predetermined relative position.


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