The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Apr. 17, 2012
Kousuke Yoshihara, Koshi, JP;
Koji Takayanagi, Koshi, JP;
Shinichi Hatakeyama, Koshi, JP;
Kohei Kawakami, Koshi, JP;
Kousuke Yoshihara, Koshi, JP;
Koji Takayanagi, Koshi, JP;
Shinichi Hatakeyama, Koshi, JP;
Kohei Kawakami, Koshi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A coating treatment apparatus supplying a coating solution to a front surface of a rotated substrate and diffusing the supplied coating solution to an outer periphery side of the substrate to thereby apply the coating solution on the front surface of the substrate includes: a substrate holding part holding a substrate; a rotation part rotating the substrate held on the substrate holding part; a supply part supplying a coating solution to a front surface of the substrate held on the substrate holding part; and an airflow control plate provided at a predetermined position above the substrate held on the substrate holding part for locally changing an airflow above the substrate rotated by the rotation part at an arbitrary position.