The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 20, 2015
Filed:
Aug. 14, 2013
Applicant:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Inventors:
Ya-Ling Cheng, Yilan, TW;
Ching-Yu Chang, Yilang County, TW;
Assignee:
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); B01D 65/02 (2006.01);
U.S. Cl.
CPC ...
B01D 65/02 (2013.01); G03F 7/00 (2013.01); B01D 2315/02 (2013.01); B01D 2321/02 (2013.01); B01D 2321/04 (2013.01); B01D 2321/162 (2013.01); B01D 2321/164 (2013.01); B01D 2321/168 (2013.01); B01D 2321/2033 (2013.01); B01D 2321/2075 (2013.01); B01D 2321/2083 (2013.01);
Abstract
A method includes performing a first cleaning step to clean a membrane, wherein during the first cleaning step, a first solvent passes through the membrane. After the first cleaning step, a second cleaning step is performed to clean the membrane. During the second cleaning step, a second solvent passes through the membrane. The first solvent and the second solvent are in different groups among three solvent groups, wherein the three solvent groups include a non-polar solvent group, a polar aprotic solvent group, and a polar protic solvent group.