The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 13, 2015
Filed:
Apr. 10, 2008
Billy W. Ward, Merrimac, MA (US);
Lou Farkas, Durham, NH (US);
John A. Notte, Gloucester, MA (US);
Randall Percival, Raymond, NH (US);
Billy W. Ward, Merrimac, MA (US);
Lou Farkas, Durham, NH (US);
John A. Notte, Gloucester, MA (US);
Randall Percival, Raymond, NH (US);
Carl Zeiss Microscopy, LLC, Thornwood, NY (US);
Abstract
In one aspect the invention provides a gas field ion source assembly that includes an ion source in connection with an optical column such that an ion beam generated at the ion source travels through the optical column. The ion source includes an emitter having a width that tapers to a tip comprising a few atoms. In other aspects, the methods provide for manufacturing, maintaining and enhancing the performance of a gas field ion source including sharpening the tip of the ion source in situ.