The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 13, 2015

Filed:

Aug. 25, 2011
Applicants:

Keiji Ashitaka, Kiyosu, JP;

Hitoshi Morinaga, Kiyosu, JP;

Muneaki Tahara, Kiyosu, JP;

Inventors:

Keiji Ashitaka, Kiyosu, JP;

Hitoshi Morinaga, Kiyosu, JP;

Muneaki Tahara, Kiyosu, JP;

Assignee:

FUJIMI INCORPORATED, Kiyosu-shi, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C09G 1/00 (2006.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/02 (2006.01); H01L 21/3105 (2006.01); B24D 3/02 (2006.01); C09C 1/68 (2006.01);
U.S. Cl.
CPC ...
C09G 1/02 (2013.01); C09K 3/1409 (2013.01); C09K 3/1463 (2013.01); H01L 21/02024 (2013.01); H01L 21/31053 (2013.01);
Abstract

A polishing composition contains colloidal silica. The colloidal silica satisfies the expression A×D×E×F≧350,000 where 'A' denotes the average aspect ratio (dimensionless) of the colloidal silica, 'D' denotes the average particle diameter (units: nm) of the colloidal silica, “E” denotes the standard deviation of the particle size (units: nm) of the colloidal silica, and “F” denotes the volume fraction (units: %) of particles having a diameter of 1 to 300 nm in the colloidal silica. The volume fraction of particles having a diameter of 1 to 300 nm in the colloidal silica is 90% or greater.


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