The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Jul. 02, 2013
Applicant:

Sumitomo Electric Industries, Ltd., Osaka-shi, Osaka, JP;

Inventors:

Shinsuke Fujiwara, Itami, JP;

Koji Uematsu, Itami, JP;

Hitoshi Kasai, Itami, JP;

Takuji Okahisa, Itami, JP;

Assignee:

SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka-shi, Osaka, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 33/32 (2010.01); H01L 21/02 (2006.01); C30B 29/40 (2006.01); C30B 25/02 (2006.01);
U.S. Cl.
CPC ...
H01L 33/325 (2013.01); C30B 25/02 (2013.01); C30B 29/406 (2013.01); H01L 21/0237 (2013.01); H01L 21/0254 (2013.01); H01L 21/02389 (2013.01); H01L 21/02576 (2013.01); H01L 21/02609 (2013.01); H01L 21/02664 (2013.01);
Abstract

A GaN-crystal free-standing substrate obtained from a GaN crystal grown by HVPE with a (0001) plane serving as a crystal growth plane and at least one plane of a {10-11} plane and a {11-22} plane serving as a crystal growth plane that constitutes a facet crystal region, except for the side surface of the crystal, wherein the (0001)-plane-growth crystal region has a carbon concentration of 5×10atoms/cmor less, a silicon concentration of 5×10atoms/cmor more and 2×10atoms/cmor less, and an oxygen concentration of 1×10atoms/cmor less; and the facet crystal region has a carbon concentration of 3×10atoms/cmor less, a silicon concentration of 5×10atoms/cmor less, and an oxygen concentration of 5×10atoms/cmor more and 5×10atoms/cmor less.


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