The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 06, 2015

Filed:

Oct. 24, 2014
Applicant:

Macronix International Co., Ltd., Hsinchu, TW;

Inventors:

Chih-Yuan Wu, Hsinchu, TW;

Kuang-Wen Liu, Hsinchu, TW;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/4763 (2006.01); H01L 21/44 (2006.01); H01L 23/528 (2006.01);
U.S. Cl.
CPC ...
H01L 23/528 (2013.01);
Abstract

A line layout method includes: forming i core layers each including a main layer that extends in a first direction and has a first end and a second end, and an end layer that is connected with the first end of the main layer and protrudes in a second direction; forming a first spacer on a sidewall of the core layer; removing the core layers; and forming 2i auxiliary patterns. i is an integer equal to or greater than 1. The auxiliary patterns extend in the first direction and are spaced and arranged in the first direction. In a region corresponding to the end layer, a portion not overlapping the auxiliary patterns has an I-beam shape.


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