The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 29, 2015
Filed:
Jun. 07, 2014
Applicant:
Fei Company, Hillsboro, OR (US);
Inventors:
Uwe Luecken, SĂĽdbrookmerland, DE;
Remco Schoenmakers, Best, NL;
Johannes Antonius Maria van den Oetelaar, Eindhoven, NL;
Assignee:
FEI Company, Hillsboro, OR (US);
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/20 (2006.01); G01N 23/04 (2006.01); H01J 37/22 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/20 (2013.01); G01N 23/046 (2013.01); H01J 37/22 (2013.01); H01J 37/28 (2013.01); H01J 2237/20207 (2013.01); H01J 2237/20228 (2013.01); H01J 2237/20235 (2013.01); H01J 2237/20264 (2013.01); H01J 2237/20285 (2013.01); H01J 2237/2802 (2013.01);
Abstract
The invention relates to an improved method of electron tomography. Electron tomography is a time consuming process, as a large number of images, typically between 50-100 images, must be acquired to form one tomogram. The invention teaches a method to shorten the time needed to acquire this amount images much more quickly by tilting the sample continuously, instead of step-by-step. Hereby the time needed to reduce vibrations between steps is eliminated.