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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9142707 B1

PDFFull Text
Date of Patent:
Sep. 22, 2015

Filed:

Feb. 18, 2014

System and method for improved epitaxial lift off

Applicant:

Alta Devices, Inc, Santa Clara, CA (US);

Inventors:

Brian Burrows, San Jose, CA (US);

Brian Brown, Palo Alto, CA (US);

Thomas Gmitter, Sunnyvale, CA (US);

Gang He, Cupertino, CA (US);

Assignee:

Alta Devices, Inc, Palo Alto, CA (US);

Attorney:
Primary Examiner:

Mark A Osele

Int. Cl.
CPC ...
B32B 38/10 (2006.01); H01L 31/18 (2006.01); H01L 21/78 (2006.01); H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01); H01L 33/00 (2010.01); B32B 43/00 (2006.01);
U.S. Cl.
CPC ...
H01L 31/18 (2013.01); H01L 21/67086 (2013.01); H01L 21/67303 (2013.01); H01L 21/67346 (2013.01); H01L 21/67757 (2013.01); H01L 21/7813 (2013.01); H01L 31/1892 (2013.01); H01L 33/005 (2013.01); B32B 43/006 (2013.01); B32B 2457/00 (2013.01); Y02E 10/50 (2013.01); Y10T 29/49824 (2015.01); Y10T 156/1111 (2015.01); Y10T 156/1168 (2015.01); Y10T 156/1978 (2015.01);
Abstract

An apparatus, system and method for performing ELO are disclosed. Device assemblies are contemporaneously etched in a stacked arrangement. Each device assembly may be placed in a respective tray, where the trays are overlapped and spaced apart from one another. In this manner, more device assemblies can be etched per unit area compared to conventional systems. Further, by stacking device assemblies during etching, the yield can be improved and/or the cost of the etch tank and associated hardware can be reduced.

Find Patent Forward Citations

Burrows, Brian. (2015). System and method for improved epitaxial lift off (U.S. Patent No. 9142707). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9142707

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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