The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Jun. 04, 2012
Applicants:
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Gerardus Adrianus Antonius Maria Kusters, Eindhoven, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Sander Catharina Reinier Derks, Budel, NL;
Inventors:
Thibault Simon Mathieu Laurent, Eindhoven, NL;
Gerardus Adrianus Antonius Maria Kusters, Eindhoven, NL;
Johan Gertrudis Cornelis Kunnen, Weert, NL;
Sander Catharina Reinier Derks, Budel, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/52 (2006.01); G03B 27/42 (2006.01); G03F 7/20 (2006.01); G01K 13/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/70875 (2013.01); G01K 13/00 (2013.01); G03F 7/707 (2013.01);
Abstract
A temperature sensing probe including a temperature sensor in an elongate housing wherein the elongate housing of the probe is elongate in a first direction and the elongate housing is comprised of a material which has a thermal conductivity of at least 500 W/mK at 20° C. in at least one direction.