The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 22, 2015
Filed:
Nov. 07, 2013
Applicant:
Novellus Systems, Inc., Fremont, CA (US);
Inventors:
Robert Rash, Portland, OR (US);
Richard Abraham, Sherwood, OR (US);
David W. Porter, Sherwood, OR (US);
Steven T. Mayer, Lake Oswego, OR (US);
Assignee:
Novellus Systems, Inc., Fremont, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
C25D 21/16 (2006.01); C25D 21/10 (2006.01); C25D 17/02 (2006.01); C25D 5/08 (2006.01); C25D 21/04 (2006.01); C25D 21/06 (2006.01); C25D 21/14 (2006.01); C25D 21/18 (2006.01); C25D 5/00 (2006.01); C25D 17/00 (2006.01); C25D 7/12 (2006.01);
U.S. Cl.
CPC ...
C25D 5/08 (2013.01); C25D 5/006 (2013.01); C25D 17/00 (2013.01); C25D 17/002 (2013.01); C25D 21/04 (2013.01); C25D 21/06 (2013.01); C25D 21/14 (2013.01); C25D 21/18 (2013.01);
Abstract
An electrolyte, and particularly anolyte, may be circulated via an open loop having a pressure regulator, so that the pressure in the plating chamber is maintained at a constant (or substantially constant) value with respect to atmospheric pressure. In these embodiments, a pressure regulator is in fluid communication with the anode chamber.