The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Sep. 18, 2013
Sumitomo Electric Industries, Ltd., Osaka-shi, Osaka, JP;
Keiji Ishibashi, Itami, JP;
Akihiro Hachigo, Itami, JP;
Yuki Hiromura, Itami, JP;
Naoki Matsumoto, Itami, JP;
Seiji Nakahata, Itami, JP;
Fumitake Nakanishi, Itami, JP;
Yusuke Yoshizumi, Itami, JP;
Hidenori Mikami, Itami, JP;
SUMITOMO ELECTRIC INDUSTRIES, LTD., Osaka-shi, Osaka, JP;
Abstract
A group III nitride composite substrate includes a support substrate and a group III nitride film. A ratio s/mof a standard deviation sof the thickness of the group III nitride film, to a mean value mof the thickness thereof is 0.001 or more and 0.2 or less, and a ratio s/mof a standard deviation sof an absolute value of an off angle between a main surface of the group III nitride film and a plane of a predetermined plane orientation, to a mean value mof the absolute value of the off angle thereof is 0.005 or more and 0.6 or less. Accordingly, there is provided a low-cost and large-diameter group III nitride composite substrate including a group III nitride film having a large thickness, a small thickness variation, and a high crystal quality.