The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Jan. 19, 2013
Applicant:
Rohm and Haas Electronics Materials Llc, Marlborough, MA (US);
Inventors:
Deyan Wang, Hudson, MA (US);
Peter Trefonas, III, Medway, MA (US);
Shintaro Yamada, Shrewsbury, MA (US);
Kathleen M. O'Connell, Cumberland, RI (US);
Assignee:
Rohm and Haas Electronic Materials LLC, Marlborough, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/033 (2006.01); C08L 33/06 (2006.01); C08K 5/56 (2006.01); G03F 1/00 (2012.01); C08K 5/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0332 (2013.01); C08K 5/0091 (2013.01); C08K 5/56 (2013.01); C08L 33/064 (2013.01); C08L 33/066 (2013.01); G03F 1/00 (2013.01);
Abstract
Compositions suitable for forming oxymetal hardmask layers are provided. Methods of forming oxymetal hardmask layers using such compositions are also provided, where the surface of the oxymetal hardmask layer formed has a water contact angle substantially matched to that of subsequently applied organic coatings.