The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Nov. 20, 2007
Applicants:

Hans-juergen Mann, Oberkochen, DE;

Michael Totzeck, Schwaebisch Gmuend, DE;

Norbert Kerwien, Moegglingen, DE;

Inventors:

Hans-Juergen Mann, Oberkochen, DE;

Michael Totzeck, Schwaebisch Gmuend, DE;

Norbert Kerwien, Moegglingen, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 27/28 (2006.01); G03F 7/20 (2006.01); G02B 21/00 (2006.01); G02B 21/06 (2006.01); G02B 21/16 (2006.01); G03F 1/00 (2012.01);
U.S. Cl.
CPC ...
G03F 7/70625 (2013.01); G02B 21/0092 (2013.01); G02B 21/06 (2013.01); G02B 21/16 (2013.01); G02B 27/28 (2013.01); G03F 7/70616 (2013.01); G02B 27/283 (2013.01); G03F 1/0092 (2013.01);
Abstract

A microscope is provided for space-resolved measurement of a predetermined structure. The microscope includes a source of radiation, which emits electromagnetic radiation of a predetermined wavelength, an optical system, which irradiates the electromagnetic radiation onto the structure to be measured and images the structure, irradiated with the electromagnetic radiation, onto a detector. The optical system has two eigen polarization conditions, and the optical system includes a polarization module by which a polarization condition can be set for the electromagnetic radiation of the source of radiation, the polarization conditions corresponding to the eigen polarization conditions.


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