The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Jun. 08, 2012
Takahiro Senzaki, Kawasaki, JP;
Ken Miyagi, Kawasaki, JP;
Shigenori Fujikawa, Wako, JP;
Mari Koizumi, Wako, JP;
Harumi Hayakawa, Wako, JP;
Takahiro Senzaki, Kawasaki, JP;
Ken Miyagi, Kawasaki, JP;
Shigenori Fujikawa, Wako, JP;
Mari Koizumi, Wako, JP;
Harumi Hayakawa, Wako, JP;
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
RIKEN, Wako-Shi, JP;
Abstract
A solvent developing negative-tone resist composition containing a base component (A) which exhibits increased polarity and reduced solubility in an organic solvent under action of an acid and an acid generator component (B) which generates an acid upon exposure, the component (A) including a resin component (A1) containing: a structural unit (a2) derived from an acrylate ester containing a 4- to 12-membered lactone-containing cyclic group, a 3- to 7-membered ether-containing cyclic group or a 5- to 7-membered carbonate-containing cyclic group; and a structural unit (a1) derived from an acrylate ester containing an acid decomposable group which exhibited increased polarity by the action of acid, and the acid generator component (B) including an acid generator (B1) containing a compound which generates a sulfonic acid upon exposure.