The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 15, 2015

Filed:

Jun. 01, 2011
Applicants:

Toshihiko Nakata, Hiratsuka, JP;

Tetsuya Matsui, Hitachi, JP;

Takehiro Tachizaki, Yokohama, JP;

Kazushi Yoshimura, Kamakura, JP;

Masahiro Watanabe, Yokohama, JP;

Inventors:

Toshihiko Nakata, Hiratsuka, JP;

Tetsuya Matsui, Hitachi, JP;

Takehiro Tachizaki, Yokohama, JP;

Kazushi Yoshimura, Kamakura, JP;

Masahiro Watanabe, Yokohama, JP;

Assignee:

HITACHI, LTD., Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 29/04 (2006.01); G01N 29/22 (2006.01); G01N 29/24 (2006.01); G01N 29/06 (2006.01);
U.S. Cl.
CPC ...
G01N 29/221 (2013.01); G01N 29/04 (2013.01); G01N 29/043 (2013.01); G01N 29/0654 (2013.01); G01N 29/2418 (2013.01);
Abstract

An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by the sample is detected by an imaging type common-path interferometer as an interference signal, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal. An internal defect inspection apparatus including an ultrasonic wave transmitter, an imaging type common-path interferometer and an ultrasonic wave signal detecting device is also provided.


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