The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 15, 2015
Filed:
Feb. 07, 2013
Applicant:
Tokyo Ohka Kogyo Co., Ltd., Kawasaki-shi, JP;
Inventors:
Takuya Ohhashi, Kawasaki, JP;
Mai Sugawara, Kawasaki, JP;
Assignee:
TOKYO OHKA KOGYO CO., LTD., Kawasaki-Shi, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 7/10 (2006.01); C09D 7/12 (2006.01); G03F 7/11 (2006.01); H01L 21/3105 (2006.01); H01L 21/027 (2006.01); H01L 21/306 (2006.01); H01L 21/321 (2006.01); G03F 7/075 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
C09D 7/1233 (2013.01); G03F 7/0752 (2013.01); G03F 7/11 (2013.01); H01L 21/02057 (2013.01); H01L 21/0271 (2013.01); H01L 21/306 (2013.01); H01L 21/3105 (2013.01); H01L 21/321 (2013.01); H01L 21/0217 (2013.01);
Abstract
A monosilane compound or bissilane compound of a specific structure having dimethylamino groups is contained in a surface treatment agent used in the hydrophobization treatment of substrate surfaces.