The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 08, 2015

Filed:

Oct. 12, 2007
Applicants:

Yasumasa Iwata, Kawasaki, JP;

Akihiko Nakamura, Kawasaki, JP;

Inventors:

Yasumasa Iwata, Kawasaki, JP;

Akihiko Nakamura, Kawasaki, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B 3/04 (2006.01); H01L 21/67 (2006.01); H01L 21/02 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6708 (2013.01); H01L 21/02057 (2013.01);
Abstract

The treatment deviceof the present invention is a treatment device for carrying out treatment to a treatment objectwhose treatment surface includes a second treatment surfaceand a first treatment surfacesurrounding the second treatment surface, the treatment device including: a table sectionfor placing the treatment objectthereon; and a first feeding sectionfor feeding a first treatment liquid to an approximate boundary between the first and the second treatment surfacesand a second feeding sectionfor feeding a second treatment liquid to the second treatment surface. Thus, the present invention provides a treatment device, a treatment method, and a surface treatment jig, each of the treatment device and the treatment method being capable of carrying out independent treatments to a treatment surface and an exposed surface surrounding the treatment surface, respectively.


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