The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 08, 2015
Filed:
Oct. 27, 2006
Kathleen Scheible, San Francisco, CA (US);
Michael Allen Flanigan, Dutch Flat, CA (US);
Goichi Yoshidome, Emeryville, CA (US);
Adolph Miller Allen, Oakland, CA (US);
Cristopher M. Pavloff, San Francisco, CA (US);
Kathleen Scheible, San Francisco, CA (US);
Michael Allen Flanigan, Dutch Flat, CA (US);
Goichi Yoshidome, Emeryville, CA (US);
Adolph Miller Allen, Oakland, CA (US);
Cristopher M. Pavloff, San Francisco, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A process kit comprises a ring assembly that is placed about a substrate support in a substrate processing chamber to reduce deposition of process deposits on the chamber components and on an overhang edge of the substrate. The process kit includes a deposition ring, cover ring, and anti-lift bracket, and can also include a unitary shield. A target is also described.