The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Sep. 01, 2015

Filed:

Jul. 08, 2013
Applicant:

Jsr Corporation, Tokyo, JP;

Inventor:

Ken Maruyama, Tokyo, JP;

Assignee:

JSR CORPORATION, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/004 (2006.01); C07C 309/06 (2006.01); C08K 5/42 (2006.01); C07C 309/12 (2006.01); C07C 381/12 (2006.01); C07D 493/08 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0045 (2013.01); C07C 309/06 (2013.01); C07C 309/12 (2013.01); C07C 381/12 (2013.01); C07D 493/08 (2013.01); C08K 5/42 (2013.01); G03F 7/0046 (2013.01); G03F 7/0397 (2013.01); G03F 7/2041 (2013.01);
Abstract

A radiation-sensitive resin composition includes a compound represented by a formula (1), and a base polymer. In the formula (1), Ris a group represented by a formula (a1), and Mrepresents a radiation-degradable monovalent cation. In the formula (a1), Rrepresents a substituted or unsubstituted chain hydrocarbon group having 1 to 30 carbon atoms, or the like. Rrepresents a substituted or unsubstituted divalent hydrocarbon group having 1 to 30 carbon atoms, or the like. Rrepresents —CO—, or the like. Rrepresents —CO—, or the like. m is an integer of 0 to 2. n is an integer of 0 to 1. A site denoted by * is a binding site with —O— in the formula (1).


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