The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Aug. 02, 2011
Applicants:
Shuichi Tamada, Kiyosu, JP;
Tatsuhiko Hirano, Kiyosu, JP;
Takahiro Umeda, Kiyosu, JP;
Kazuya Sumita, Kiyosu, JP;
Yoshihiro Izawa, Kiyosu, JP;
Inventors:
Shuichi Tamada, Kiyosu, JP;
Tatsuhiko Hirano, Kiyosu, JP;
Takahiro Umeda, Kiyosu, JP;
Kazuya Sumita, Kiyosu, JP;
Yoshihiro Izawa, Kiyosu, JP;
Assignee:
FUJIMI INCORPORATED, Kiyosu-shi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C09K 13/00 (2006.01); H01L 21/306 (2006.01); B24B 37/04 (2012.01); C09G 1/02 (2006.01); C09K 3/14 (2006.01); H01L 21/321 (2006.01);
U.S. Cl.
CPC ...
H01L 21/30625 (2013.01); B24B 37/044 (2013.01); C09G 1/02 (2013.01); C09K 3/1409 (2013.01); C09K 3/1463 (2013.01); H01L 21/3212 (2013.01);
Abstract
A polishing composition contains a water-soluble polymer, a polishing accelerator, and an oxidizing agent. The water-soluble polymer is a polyamide-polyamine polymer having an amine value of 150 mg KOH/1 g·solid or greater.