The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 25, 2015
Filed:
Mar. 12, 2012
Martijn Constant Van Beurden, Eindhoven, NL;
Martijn Constant Van Beurden, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
Algorithm for reconstructing grating profile in a metrology application is disclosed to numerically solve a volume integral equation for a current density. It employs implicit construction of a vector field that is related to electric field and a current density by a selection of continuous components of vector field being continuous at one or more material boundaries, so as to determine an approximate solution of a current density. The vector field is represented by a finite Fourier series with respect to at least one direction, x, y. Numerically solving volume integral equation comprises determining a component of a current density by convolution of the vector field with a convolution operator, which comprises material and geometric properties of structure in the x, y directions. The current density is represented by a finite Fourier series with respect to x, y directions. Continuous components are extracted using convolution operators acting on electric field and current density.