The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2015

Filed:

Sep. 18, 2012
Applicant:

Mie Fujitsu Semiconductor Limited, Kuwana, JP;

Inventors:

Sameer Pradhan, San Jose, CA (US);

Dalong Zhao, San Jose, CA (US);

Lingquan Wang, Los Gatos, CA (US);

Pushkar Ranade, Los Gatos, CA (US);

Lance Scudder, Sunnyvale, CA (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01); H01L 21/00 (2006.01); H01L 21/04 (2006.01); H01L 21/22 (2006.01); H01L 21/8258 (2006.01); H01L 29/10 (2006.01); H01L 21/02 (2006.01); H01L 29/167 (2006.01); H01L 29/786 (2006.01);
U.S. Cl.
CPC ...
H01L 21/8258 (2013.01); H01L 21/0243 (2013.01); H01L 21/02529 (2013.01); H01L 21/2205 (2013.01); H01L 29/1079 (2013.01); H01L 29/167 (2013.01); H01L 29/78684 (2013.01);
Abstract

A method of fabricating a semiconductor device includes providing a substrate having a semiconducting surface and forming a first epitaxial layer on the semiconducting surface. The first epitaxial layer includes a first semiconducting material doped in-situ with at least one dopant of a first conductivity type. The method also includes adding at least one dopant of a second conductivity type into one portion of the substrate to define at least one counter-doped region with an overall doping of the second conductivity type and at least one other region with an overall doping of the first conductivity type in the other portions of substrate. The method further includes forming a second epitaxial layer on the first epitaxial layer, the second epitaxial layer being a second semiconducting material that is substantially undoped.


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