The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 18, 2015
Filed:
Aug. 31, 2012
Applicants:
N. William Parker, Hillsboro, OR (US);
Wesley Hughes, Beaverton, OR (US);
Inventors:
N. William Parker, Hillsboro, OR (US);
Wesley Hughes, Beaverton, OR (US);
Assignee:
FEI COMPANY, Hillsboro, OR (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/05 (2006.01); H01J 37/305 (2006.01);
U.S. Cl.
CPC ...
H01J 37/05 (2013.01); H01J 37/3056 (2013.01); H01J 2237/043 (2013.01); H01J 2237/057 (2013.01); H01J 2237/1534 (2013.01);
Abstract
A multi-element electrostatic chicane energy filter, with the addition of electrostatic quadrupole and hexapole excitations to the dipole elements. A charged particle energy filter according to the present invention with a combination of dipole, quadrupole, and hexapole elements capable of producing a line focus at an aperture reduces space-charge effects and aperture damage. A preferred embodiment allows the filter to act as a conjugate blanking system. The energy filter is capable of narrowing the energy spread to result in a smaller beam.