The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 11, 2015

Filed:

Jan. 13, 2015
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Andy C. Wei, Queensbury, NY (US);

Akshey Sehgal, Malta, NY (US);

Seung Y. Kim, North Andover, MA (US);

Teck Jung Tang, Ballston Lake, NY (US);

Francis M. Tambwe, Malta, NY (US);

Assignee:

GLOBALFOUNDRIES Inc., Grand Cayman, KY;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/76 (2006.01); H01L 29/10 (2006.01); H01L 27/088 (2006.01);
U.S. Cl.
CPC ...
H01L 29/1083 (2013.01); H01L 27/0886 (2013.01);
Abstract

A FinFET device includes a plurality of fin structures positioned in and above a semiconducting substrate, wherein each of the fin structures includes a first portion of the semiconducting substrate, an undoped layer of semiconducting material positioned above the first portion of the semiconducting substrate, and a dopant-containing layer of semiconducting material positioned between the first portion of the semiconducting substrate and the undoped semiconducting material, wherein the dopant material is adapted to retard diffusion of one of boron and phosphorous. A gate electrode is positioned around at least the undoped layer of semiconducting material of each of the plurality of fin structures, wherein a height level of a bottom surface of the gate electrode is positioned approximately level with or lower than a height level of a bottom of the undoped layer of semiconducting material of each of the plurality of fin structures.


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