The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 11, 2015
Filed:
Jul. 27, 2012
Yasuhiko Matsuda, Tokyo, JP;
Takanori Kawakami, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Ken Maruyama, Tokyo, JP;
Yasuhiko Matsuda, Tokyo, JP;
Takanori Kawakami, Tokyo, JP;
Kazuki Kasahara, Tokyo, JP;
Ken Maruyama, Tokyo, JP;
JSR CORPORATION, Tokyo, JP;
Abstract
A radiation-sensitive resin composition includes a compound represented by a following formula (1), and a first polymer that serves as a base resin. Rrepresents a monovalent alicyclic hydrocarbon group having 3 to 20 carbon atoms, or the like. The Mrepresents a monovalent cation. The first polymer (B) is preferably insoluble or hardly soluble in alkali, the polymer including a structure unit represented by a formula (5) or a structure unit represented by a formula (6), and a structure unit represented by a formula (7).