The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Nov. 08, 2010
Yoshinobu Hoshino, Hitachinaka, JP;
Shigeru Kawamata, Hitachinaka, JP;
Eisaku Oho, Kunitachi, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
A signal processing unit () of a charged particle microscope calculates a degradation function (H (s)) of an image, on the basis of detection signals () obtained by scanning a charged particle beam () at two types of scanning speeds, a scanning speed within the bandwidths of a detector () and an amplifying circuit at a subsequent stage of the detector, and another scanning speed exceeding the upper limit of the bandwidths. Then, the signal processing unit creates a one-dimensional correction filter for recovering image quality, from an inverse function (H(s)) of the degradation function, and applies the one-dimensional correction filter to the detection signal recorded at the scanning speed exceeding the upper limit of the bandwidths of the detector and the amplifying circuit at a subsequent stage of the detector, or to a two-dimensional image based on the detection signal.