The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Mar. 27, 2014
Applied Materials Israel, Ltd., Rehovot, IL;
Carl Zeiss Smt Gmbh, Jena, DE;
Steven R. Rogers, D.N. Emek Sorek, IL;
Rainer K. Knippelmeyer, Aalen, DE;
Thomas Kemen, Aalen, DE;
Stefan Schubert, Oberkochen, DE;
Nissim Elmaliah, Raanana, IL;
APPLIED MATERIALS ISRAEL, LTD., Rehovot, IL;
Abstract
A charged particle beam focusing apparatus includes a charged particle beam generator configured to project simultaneously at least one non-astigmatic charged particle beam and at least one astigmatic charged particle beam onto locations on a surface of a specimen, thereby causing released electrons to be emitted from the locations. The apparatus also includes an imaging detector configured to receive the released electrons from the locations and to form images of the locations from the released electrons. A processor analyzes the image produced by the at least one non-astigmatic charged particle beam and in response thereto adjusts a focus of the at least one non-astigmatic charged particle beam.