The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 04, 2015
Filed:
Feb. 23, 2012
Jan-gerard Cornelis Van Der Toorn, Eindhoven, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Stefan Geerte Kruijswijk, Eindhoven, NL;
Jeroen Pieter Starreveld, Eindhoven, NL;
Michael Johannes Vervoordeldonk, Rosmalen, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
Jan-Gerard Cornelis Van Der Toorn, Eindhoven, NL;
Marcel Koenraad Marie Baggen, Nuenen, NL;
Stefan Geerte Kruijswijk, Eindhoven, NL;
Jeroen Pieter Starreveld, Eindhoven, NL;
Michael Johannes Vervoordeldonk, Rosmalen, NL;
Mark Constant Johannes Baggen, Eindhoven, NL;
ASML NETHERLANDS B.V., Veldhoven, NL;
Abstract
A stage system includes an object table constructed to hold an object, a short stroke actuator element constructed to displace the object table over a first range of movement, and a long stroke actuator element constructed to displace the short stroke actuator element over a second range of movement which is larger than the first range of movement. The stage system further includes a pneumatic compensation device including: a sensor arranged to measure a quantity representative of a pneumatic disturbance force on the short stroke actuator element, an actuator arranged to provide a compensating force to at least partly compensate the pneumatic disturbance, and a controller. The sensor is connected to a controller input of the controller, the actuator is connected to a controller output of the controller, the controller being arranged to drive the actuator in response to a signal received from the sensor.