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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 9097973 B1

PDFFull Text
Date of Patent:
Aug. 04, 2015

Filed:

Jun. 29, 2011

Method of forming pattern and developer for use in the method

Applicants:

Yuichiro Enomoto, Shizuoka, JP;

Shinji Tarutani, Shizuoka, JP;

Sou Kamimura, Shizuoka, JP;

Kaoru Iwato, Shizuoka, JP;

Keita Kato, Shizuoka, JP;

Kana Fujii, Shizuoka, JP;

Inventors:

Yuichiro Enomoto, Shizuoka, JP;

Shinji Tarutani, Shizuoka, JP;

Sou Kamimura, Shizuoka, JP;

Kaoru Iwato, Shizuoka, JP;

Keita Kato, Shizuoka, JP;

Kana Fujii, Shizuoka, JP;

Assignee:

FUJIFILM Corporation, Tokyo, JP;

Attorney:

Sughrue Mion, PLLC

Primary Examiner:

Daborah Chacko Davis

Int. Cl.
CPC ...
G03F 7/42 (2006.01); G03F 7/039 (2006.01); G03F 7/038 (2006.01); G03F 7/32 (2006.01); G03F 7/004 (2006.01); G03F 7/20 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); G03F 7/0382 (2013.01); G03F 7/325 (2013.01); G03F 7/0046 (2013.01); G03F 7/2041 (2013.01);
Abstract

Provided is a method of forming a pattern, including (a) forming a chemically amplified resist composition into a film, (b) exposing the film to light, and (c) developing the exposed film with a developer containing an organic solvent, wherein the developer contains an alcohol compound (X) at a content of 0 to less than 500 ppm based on the total mass of the developer.

Find Patent Forward Citations

Enomoto, Yuichiro. (2015). Method of forming pattern and developer for use in the method (U.S. Patent No. 9097973). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/9097973

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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