The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Jan. 03, 2012
Applicants:
Christopher Vincent Baiocco, Newburgh, NY (US);
Michael P. Chudzik, Danbury, CT (US);
Deleep R. Nair, Fishkill, NY (US);
Jay M. Shah, Poughkeepsie, NY (US);
Inventors:
Christopher Vincent Baiocco, Newburgh, NY (US);
Michael P. Chudzik, Danbury, CT (US);
Deleep R. Nair, Fishkill, NY (US);
Jay M. Shah, Poughkeepsie, NY (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 21/762 (2006.01); H01L 29/66 (2006.01); H01L 29/78 (2006.01);
U.S. Cl.
CPC ...
H01L 21/76224 (2013.01); H01L 21/762 (2013.01); H01L 29/66537 (2013.01); H01L 29/783 (2013.01);
Abstract
Oxygen scavenging material embedded in an isolation structure provides improved protection of high dielectric constant (Hi-K) materials from oxygen contamination while avoiding alteration of work function and switching threshold shift in transistors including such Hi-K materials.