The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 28, 2015
Filed:
Jun. 23, 2010
Toru Fujimori, Shizuoka, JP;
Koji Shirakawa, Shizuoka, JP;
Toshihiro Usa, Kanagawa, JP;
Kenji Sugiyama, Kanagawa, JP;
Takayuki Ito, Shizuoka, JP;
Hideaki Tsubaki, Shizuoka, JP;
Katsuhiro Nishimaki, Kanagawa, JP;
Shuji Hirano, Shizuoka, JP;
Hidenori Takahashi, Shizuoka, JP;
Toru Fujimori, Shizuoka, JP;
Koji Shirakawa, Shizuoka, JP;
Toshihiro Usa, Kanagawa, JP;
Kenji Sugiyama, Kanagawa, JP;
Takayuki Ito, Shizuoka, JP;
Hideaki Tsubaki, Shizuoka, JP;
Katsuhiro Nishimaki, Kanagawa, JP;
Shuji Hirano, Shizuoka, JP;
Hidenori Takahashi, Shizuoka, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.